연구개발

연구개발

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Develop Modified Polisher Head

Improved CMP head to increase uniformity on both the edge and entire surface of silicon wafers during mass production.
It is specially designed for wafer suppliers to meet their customer’s production requirements for increased uniformity and quality versus current polishing equipment.
  • 01
    Multi Zone Pneumatics (Merits for wafer Edge Polish Rate and uniformity)
  • 02
    Membrane & Chuck Plate (Easy Maintenance)
  • 03
    Clean Plastic materials for Guide Ring (Reduce Particles & increase Ring Life Time)
  • 04
    Polish Head Gimbals Joint (Control Polish Head pressure)
  • 05
    3 zone Chuck Plate (Ease to change Membrane & retainer ring)
  • 06
    2 Zone Guide Ring (Easy to change Guide Ring)
  • 07
    Patent pending