Improved CMP head to increase uniformity on both the edge and entire surface of silicon wafers
during mass production.
It is specially designed for wafer suppliers to meet their customer’s production requirements
for increased uniformity and
quality versus current polishing equipment.
01
Multi Zone Pneumatics (Merits for wafer Edge Polish Rate and uniformity)
02
Membrane & Chuck Plate (Easy Maintenance)
03
Clean Plastic materials for Guide Ring (Reduce Particles & increase Ring Life
Time)
04
Polish Head Gimbals Joint (Control Polish Head pressure)
05
3 zone Chuck Plate (Ease to change Membrane & retainer ring)